In-line thin film measurement Elli-RSc-AMPE
Spectral reflectometer is a high-speed film thickness measurement system, which can perform single-point measurement within 1 second (depending on material properties). Up to 3 layers of film can be measured (depending on material properties), thickness range is 10nm-50mm (depending on material properties). Equipped with a microscope system, the size of the light spot can be adjusted, which is suitable for semiconductor, OLED, polymer, solar energy, etc. research and material thickness detection
System characteristics:
Light source wavelength range: 450nm – 900nm
Light spot size: 50um, 25um
Measurement layers: up to 3 layers (depending on material properties)
Measuring thickness range: 10nm – 50mm (depending on material properties)
Repeatability: ± 1.5 Å on 10 times measurement / Thick film: ± 3%
(Standard sample: SiO2 100nm)
Film thickness resolution: 0.01 nm / Thick film: 0.01 um
Combined with the 4.6-inch front-end equipment module (EFEM) design, including 4 ", 6" wafer transfer robot arm, Casstte, alignment time in seconds.
X, Y, Z automatic stage size: 180x180x60mm
Can be installed with single-wavelength laser excitation light source
Upgradeable autofocus (z-axis motorized) function
application:
² Semiconductor Si, Ge, SiO2, ONO, ZnO, PR, poly-Si, GaN, GaAs
² Display (incl. OLED) MgO, ITO, PR, Alq3, CuPc, PVK, PAF, PEDT-PSS
² Dielectric materials SiO2, TiO3, Ta2O5, ITO, AIN, ZrO2, Si3N4, Ga2O3, Wet Oxides
² Polymer Dye, NPB, MNA, PVA, PET, TAC, PR
² Chemicals Organic Film (OLED) & LB Thin Film
² Solar cell SiN, a-Si, poly-Si, SiO2
