橢圓偏儀ME210

In-line Raman Spectrometer

The online Raman spectrum detection system has powerful expansion capability and customized system configuration, and can design a dedicated measurement system according to application requirements.

In-line thin film measurement Elli-RSc-AMPE

Spectral reflectometer is a high-speed film thickness measurement system, which can perform single-point measurement within 1 second (depending on material properties). Up to 3 layers of film can be measured (depending on material properties), thickness range is 10nm-50mm (depending on material properties). Equipped with a microscope system, the size of the light spot can be adjusted, which is suitable for semiconductor, OLED, polymer, solar energy, etc. research and material thickness detection

自動化共軛焦顯微拉曼光譜儀

UniDRON-semi Automatic Control Confocal Micro Raman / PL Spectroscopy

特色：
*全自動控制設計
*最高支援5組雷射
*可容納12吋晶圓全範圍掃描

碳化矽/晶圓應力檢測機

應用:半導體產業