In-line thin film measurement Elli-RSc-AMPE

Spectral reflectometer is a high-speed film thickness measurement system, which can perform single-point measurement within 1 second (depending on material properties). Up to 3 layers of film can be measured (depending on material properties), thickness range is 10nm-50mm (depending on material properties). Equipped with a microscope system, the size of the light spot can be adjusted, which is suitable for semiconductor, OLED, polymer, solar energy, etc. research and material thickness detection